Specialty and Semiconductor Gases

Monosilane, Disilane, and Silicon Tetrafluoride.

Usage detail

LSI, LCD, solar cells and other silicon devices

Usage
  • Introduction

Mitsui Chemicals America, Inc. offers a number of specialty and semiconductor gases, such as Monosilane, Disilane, and Silicon Tetrafluoride. For specific specialty gas and/or application information, please contact the product manager directly.

For Information on NF3, please contact our affiliate Anderson Development Company

Contact Us

MITSUI CHEMICALS AMERICA, INC.
TEL+1 914-253-0777
FAX+1 914-253-0790